Developed within the framework of an international standards program called International Semiconductor Equipment and Materials (SEMI), the SEMI F100 standard provides a test method for verifying the compatibility of each diaphragm valve for the metric perfluoroalkoxy (PFA) tube. However, this test method is ineffective because the conditions for maintaining the current state are not met. Such inactive standards or safety guidelines may be retrieved from SEMI and remain valid for use. This standard specifies the opening giving the minimum flow coefficient for the diaphragm valve for the metric perfluoroalkoxy (PFA) tube. With this test method, it explains how to verify the flow coefficient of the diaphragm valve by comparing it with the corresponding opening.
These diaphragm valves are used in chemical distribution systems for semiconductor and flat panel display manufacturing. Valves are made of materials such as polytetrafluoroethylene or perfluoroalkoxy, which have high corrosion resistance and low contamination contribution to the fluid. These valves withstand up to 0,2 megapascals of back pressure. The purpose of the shutoff valve is to switch from fully open to fully closed.
Perfluoroalkoxy (PFA) piping is a type of piping used by many industries in a wide and varied manner. These tubing contain a combination that combines the strengths of both polytetrafluoroethylene and fluorinated ethylene propylene tubing, allowing users to take advantage of the properties of both.
PFA pipes are such a hard material that in some cases they even replace stainless steel pipes. They are preferred by companies due to their many advantages. This pipe system is strong against high temperatures and pressures, and is also resistant to chemicals.
Perfluoroalkoxy (PFA) piping is the preferred material for moving elements. Its flexibility and resistance to cracks and breaks make it perfect for moving parts in machinery.
Among the numerous test, measurement, analysis and evaluation studies it provides for businesses in various sectors, our organization also provides compliance testing services for the minimum flow coefficient of the diaphragm valve for the metric PFA tube within the scope of the SEMI F100 standard, with its trained and expert staff and advanced technological equipment.
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