Developed within the framework of an international standards program called International Semiconductor Equipment and Materials (SEMI), which includes activities for the benefit of industries such as semiconductor, integrated circuits, transistors, diodes and flat panel display worldwide, the SEMI F71 standard is technically approved by the Gases Global Technical Committee. is a standard. The test method defined in this standard applies to gas distribution systems installed in semiconductor manufacturing equipment.
This standard does not purport to address all, if any, security issues associated with its use. It is the responsibility of users of this standard to establish appropriate safety and health practices prior to use and to determine the applicability of limitations.
In a low-pressure gas distribution system, the gas pressure in the mains and service lines is substantially the same as that delivered to the user's devices. In such a system, a service regulator is not required on the separate service lines. The high pressure gas distribution piping system operates at a higher pressure than the standard service pressure given to the user. In such a system, a service regulator is required on each service line to control the pressure.
The different external heat transfer patterns depend on the influence of pipeline fluid pressures and the calculation of temperatures in response to the annual ambient temperature cycle. In the heat transfer model, the ambient temperature cycle is represented by the soil surface temperature, which has a periodic function of time. However, the results are not sensitive to the choice of external heat transfer pattern of pipeline pressures. For the base case, which generally represents the natural gas export pipeline, the impact on the calculated gas temperatures is limited.
Many materials in a gas distribution system undergo changes depending on the factors in the environment. Resistance tests to environmental conditions are aimed at detecting these changes.
Gas distribution systems must safely and effectively deliver gases from a high-pressure source to the final process at the pressure and flow rate required by each application.
Our organization also provides testing services for the gas distribution system temperature cycle within the scope of the SEMI F71 standard, with its trained and expert staff and advanced technological equipment, among the numerous test, measurement, analysis and evaluation studies it provides for businesses in various sectors.
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