In the SEMI F113 standard, developed within the framework of an international standards program called International Semiconductor Equipment and Materials (SEMI), which includes activities for the benefit of industries such as semiconductor, integrated circuits, transistors, diodes and flat panel display around the world, it is used in gas distribution systems for semiconductor processing. A test method for electronic pressure transducers is described.
The test method described is for testing leak integrity, warm-up time, voltage accuracy, inaccuracy, linearity, repeatability, hysteresis, reproducibility, thermal coefficient, bias, accelerated life cycle, and proof pressure of pressure transducers with the full pressure range of 2757.9 or less in gas distribution systems. includes procedures.
While preparing this standard, the following SEMI standards were taken as reference:
Energy technology relies on pressure transducers to create a reliable energy system. Pressure transducers are an excellent solution for biogas, natural gas, and more. These energy sources require pressure measurement to ensure they are safe and reliable. Industries that generally need to monitor gas pressure are those with complex systems where even the smallest pressure miscalculation can lead to disaster.
Our organization also provides testing services for pressure transducers used in gas distribution systems within the scope of SEMI F113 standard, with its trained and expert staff and advanced technological equipment, among the numerous test, measurement, analysis and evaluation studies it provides for businesses in various sectors.
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