Developed within the framework of an international standards program called International Semiconductor Equipment and Materials (SEMI), the SEMI F104 standard describes the requirements and presents test methods to evaluate and compare components in ultrapure water liquid flow in terms of particle contribution. This standard defines two test methods for evaluating particle contribution: the rinse test method and the dynamic test method.
Both test methods are applied to liquid chemical and ultrapure water system components intended for use in semiconductor manufacturing tools and ancillary equipment.
The test methods described in this standard are tests to measure the particulate contribution of components when using ultrapure water as the test medium. For the purposes of this standard, ultrapure water must meet the minimum requirements outlined in the standard. When applying these test methods, a liquid optical particle measuring instrument is used to measure performance. This device is commonly used as a particle counter to detect and monitor particulate contamination in certain clean environments, including air, water and chemicals. Particle counters are used in industrial technologies such as electronic components and assemblies, pharmaceutical drug products and medical devices, and oil and gas to support cleaner production practices.
While preparing this standard, the following SEMI standards were taken as reference:
Among the numerous tests, measurements, analyses, and evaluations our organization provides for businesses in various sectors, we also offer testing services for the evaluation of particle content in components used in ultra-pure water and liquid chemical dispensing systems under the SEMI F104 standard, utilizing a trained and expert staff and advanced technological equipment.
To get an appointment, to get more detailed information or to request an evaluation, you can ask us to fill in our form and reach you.
