The SEMI F111 standard, developed within the framework of an international standards program called Semiconductor Equipment and Materials International (SEMI), which includes activities benefiting industries such as semiconductors, integrated circuits, transistors, diodes, and flat panel displays worldwide, defines a test method for measuring the particle removal capability of equipment fan filter units (EFFUs) mounted inside equipment.
-partikul-temizleme-icin-test-yontemi.jpg "SEMI F111 Equipment Fan Filter Unit (EFFU) Test Method for Particulate Removal")
Since there is a fan particulate filter, fan and motor assembly installed inside the equipment, the integrity of these parts is very important to the performance of the equipment fan filter unit. Therefore, a conventional particulate removal test method for particulate filters is suitable for evaluating the particulate removal performance of the equipment fan filter unit.
The test method described in this standard describes an evaluation method for an equipment fan filter unit installed in a confined space to remove particles produced within the process equipment. The particulate removal performance of equipment fan filter units is generally dependent on the performance of the filter media and the air flow rate. To understand the performance of an equipment fan filter unit, it is necessary to simultaneously consider the filter media specification, the air flow rate, and the integrity of the equipment fan filter unit parts. Briefly, this test method aims to demonstrate the system performance of the equipment fan filter unit.
The equipment fan filter unit is a kind of motorized air filtration equipment. It is used to remove harmful airborne particles from ambient air and to supply purified air to clean rooms, laboratories, medical facilities or micro-environments. These units usually contain their own filter, HEPA filter and internally controlled fan air distribution. Equipment fan filter units are flexible and economical solutions for removing particulate from one-way ventilated equipment.
While preparing this standard, the following SEMI standard was taken as reference:
Among the numerous test, measurement, analysis and evaluation studies it provides for businesses in various sectors, our organization also provides test services for particle cleaning of equipment fan filter unit (EFFU) within the scope of SEMI F111 standard, with its trained and expert staff and advanced technological equipment.
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