Developed within the framework of an international standards program called International Semiconductor Equipment and Materials (SEMI), the SEMI F74 standard describes a test method for evaluating metal seal designs used in gas distribution systems. This test method covers both surface-mounted gas systems and conventional metal-surface-sealed joint systems.
The test methods described in this standard are applied to joint seals used in conventional pipe-type gas systems and substrates used in surface-mount gas systems between modules and components. This standard does not address security issues, if any, for its use. It is the responsibility of users of this standard to establish appropriate safety and health practices and determine regulatory restrictions prior to implementation. Meanwhile, this test method does not provide sufficient detailed information for application.
The test methods mentioned here are destructive in some cases. Therefore, several samples are required to complete all viable tests without invalidating subsequent tests, and the sequence of tests must be carefully planned.
All components must meet dimensional, scaling-surface coating and similar quality requirements set and checked by the manufacturers prior to testing.
Surface-mounted connection methods and system design affect external load testing, i.e. vibration, shock and similar testing. Gaskets must be manufactured and packaged for class 100 type applications. Care must be taken when working with gaskets to maintain the manufacturer's specifications.
Metal seals are used in high pressure applications such as oil and gas supply generation. They are also used in valves and piping, assemblies in refineries, and in other process industries. These gaskets provide sealing when pressure forces are applied.
While preparing this standard, the following SEMI standards were taken as reference:
Among the numerous test, measurement, analysis and evaluation studies it provides for businesses in various sectors, our organization also provides test services for the performance and evaluation of metal gasket designs for use in gas distribution systems within the scope of SEMI F74 standard, with its trained and expert staff and advanced technological equipment.
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