Developed under an international standards program called International Semiconductor Equipment and Materials (SEMI), the SEMI F69 standard is a technically approved standard by the Gases Global Technical Committee. This standard provides test methods to be applied to characterize the mechanical integrity of gas distribution systems through vibration and shock testing. Test methods recommended here include vibration (transport simulation) and shock testing of gas distribution systems (including conventional and surface mount) for semiconductor processing.
The test methods defined in the SEMI F69 standard apply to gas distribution systems that are not packaged for shipment. Specifically, test methods apply to assembled and interconnected gas distribution components and their associated mounting panel, with or without a sheet metal shield.
For the purpose of this standard, transport vibration and simulation are expected to be higher than normal at vibration levels in use. Therefore, transport simulation testing is considered acceptable to assess adequate mechanical integrity for both shipping and life-cycle vibration stress of gas distribution systems.
The purpose of shock testing is to provide a more detailed assessment of equipment failures resulting from shocks during unpacking, installation or field use.
It represents a recommended mechanical integrity for gas distribution systems architecture, design and assembly techniques, if the tests recommended in this standard are successfully completed.
When gases are used in significant volumes, a centralized gas distribution system is a practical necessity. A well-designed distribution system lowers operating costs, increases productivity, and increases safety. A central system allows consolidation of all cylinders in one storage location. In this application, gases are separated according to their types to increase safety.
While preparing this standard, the following SEMI standard was taken as reference:
Among the numerous test, measurement, analysis and evaluation studies it provides for businesses in various sectors, our organization also provides test services for the transmission and shock testing of gas distribution systems within the scope of SEMI F69 standard, with its trained and expert staff and advanced technological equipment.
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