SEMI F 64, developed within the framework of an international standards program called Semiconductor Equipment and Materials International (SEMI), which includes activities benefiting industries such as semiconductors, integrated circuits, transistors, diodes, and flat panel displays worldwide, defines a test method for characterizing a mass flow controller intended for installation in a gas distribution system. This test method is applied to determine the effect of transient and steady-state inlet and outlet pressure conditions on the performance of the mass flow controller.
This test method provides a common basis for communication between manufacturers and users regarding the testing and explanation of mass flow controller pressure effects.
With this test method, the effects of upstream (inlet) and downstream (outflow) transient pressure on specified and actual flow are determined. This test method gives the results of actual outlet flow versus specified flow and mass flow controller setpoint affected by steady-state inlet pressure. The method applies to mass flow controllers with a maximum flow range of up to 1000 sccm (standard cubic centimeters per minute).
The increase in pressure causes the gas to be compressed. Gases have a higher density and occupy a smaller volume. In other words, if a certain mass of gas is flowing, its volume is smaller. Since the same mass of gas flows through the same pipe, the velocity of the compressed gas decreases.
In gas applications, gas pressure fluctuations can affect the velocity of the gas, thus significantly affecting gas flow measuring instruments.
Essentially, flow is a measure of air output in volume per unit time. Speed refers to how fast air moves per unit time. Pressure is the measure of force applied to an area.
Among the numerous test, measurement, analysis and evaluation studies that our company provides for businesses in various sectors, with its trained and expert staff and advanced technological equipment, test services for the determination of the pressure effects on the actual flow and shown for the mass flow control devices within the scope of the SEMI F64 standard. gives.
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