Developed within the framework of an international standards program called International Semiconductor Equipment and Materials (SEMI), which includes activities for the benefit of industries such as semiconductor, integrated circuits, transistors, diodes and flat panel display worldwide, the SEMI F106 standard is technically approved by the Gases Global Technical Committee. is a standard. This standard describes a test method for detecting internal helium leaks for gas distribution systems. This standard covers both conventional metal face sealing and surface mounted gas distribution systems.
The presented test method is applicable to all types of high-purity gas distribution systems used in semiconductor manufacturing plants and comparable research and development areas.
Helium leak testing is applied to detect possible leaks in different types of closed or sealed systems that use helium as a tracer gas. With this test, the leak (leakage) concentration is measured and determined as the leak rate.
The main key qualities of helium gas that make it ideal for leak testing are:
In short, helium-based test methods are a highly sensitive leak test technology equipped with the detection of extremely small leaks that are not possible with other leak test methods. High vacuum technique is used for this test. A very low leak test thresholds are provided, a level of sensitivity that allows for unparalleled comparisons between package components.
Our organization, among the numerous test, measurement, analysis and evaluation studies it provides for businesses in various sectors, also provides test services for the determination of the leak integrity of gas distribution systems with helium leak detector within the scope of SEMI F106 standard, with its trained and expert staff and advanced technological equipment.
To get an appointment, to get more detailed information or to request an evaluation, you can ask us to fill in our form and reach you.
