Developed within the framework of an international standards program called International Semiconductor Equipment and Materials (SEMI), the SEMI F114 standard defines a test method for determining organic compounds on the wet surfaces of ultra-high purity (UHP) chemical delivery systems and components.
This test method is applicable to ultra-high purity chemical delivery systems and components. Examples of tests include valves, regulators, filters and mass flow controllers, piping, weld fittings and face seal fittings. The test method described is also used to detect contamination from an assembly or production area. This test method details the method of removing and measuring organic contaminants found on wet surfaces.
Briefly, this test method can also be used to evaluate the effectiveness of various washing or cleaning processes.
While preparing this standard, the following SEMI standards were taken as reference:
Organic pollutants are defined as carbon-based chemicals such as organic solvents, pesticides, petroleum-based wastes, timber, and volatile compounds in gaseous or liquid phase. Organic pollutants generally cause negative impacts on the environment. Trace levels of organic pollutant residues found in soil, water, air, and sometimes food are considered harmful to human and environmental health. Organic pollutants in gaseous or liquid phase may include solvents, chemical precursors and intermediates, and volatile organic compounds (VOCs) in the form of petroleum compounds.
Among the numerous test, measurement, analysis and evaluation studies that our organization provides for businesses in various sectors, with its trained and expert staff and advanced technological equipment, testing services for the determination of organic pollutants on the wet surfaces of ultra-high purity chemical distribution systems and components within the scope of SEMI F114 standard. also gives.
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