SEMI F101 Test Method for Determining Pressure Regulator Performance in Gas Distribution Systems

SEMI F101 Test Method for Determining Pressure Regulator Performance in Gas Distribution Systems

Developed within the framework of an international standards program called International Semiconductor Equipment and Materials (SEMI), the SEMI F101 standard defines a test method for testing pressure regulators considered for installation in gas systems. Application of this testing method is expected to provide comparable data between regulators tested for qualification purposes. This standard provides a test method to determine regulator performance characteristics.

SEMI F101 Test Method for Determining Pressure Regulator Performance in Gas Distribution Systems

This test method applies to pressure regulators. Test methods that measure these properties should be performed in the following order:

  • Particle number
  • Leakage
  • creep / crash
  • Feed pressure effect
  • Resolution
  • Flow curve, hysteresis curve and pressure versus operating hysteresis value
  • Repeatability
  • Adjusting the pressure stability
  • step function transient response
  • Resonance
  • flow coefficient
  • Overpressure
  • Durability

In short, this test method provides a common basis for communication between manufacturers and users.

Manufacturers design their gas distribution systems based on best practices and create many configurations to suit needs. Standards-compliant and configurable gas distribution systems are designed to help protect system operators, increase process uptime, and improve process accuracy and repeatability. Safety and functionality are the most important factors in this process. Systems include one or a set of pressure regulators to effectively deliver gases from a high-pressure source to the rest of the facility at the pressure and flow rate required by each application. At this point, it is important to determine the pressure regulator performance. For commercial and industrial users, stable pressure is essential so that operations are not compromised.

While preparing this standard, the following SEMI standards were taken as reference:

  • SEMI F1 Leak integrity specification of high purity gas piping systems and components
  • SEMI F32 Test method for determining the flow coefficient in high purity shutoff valves

Among the numerous tests, measurements, analyses, and evaluations our organization provides for businesses in various sectors, we also offer testing services to determine the performance of pressure regulators in gas distribution systems within the scope of the SEMI F101 standard, thanks to our trained and expert staff and advanced technological equipment.

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