Test Method for Determining SEMI F68 Clarifier Efficiency

Test Method for Determining SEMI F68 Clarifier Efficiency

Developed under an international standards program called International Semiconductor Equipment and Materials (SEMI), the purpose of the SEMI F68 standard is to define a test method for determining the effectiveness of a clarifier for removing an active gaseous impurity from a matrix gas. That is, the aim is to determine the effectiveness of a gas purifier for removing a certain type of pollution.

Test Method for Determining SEMI F68 Clarifier Efficiency

Efficiency tests are performed by adding ppm (parts per million) levels of gaseous impurities to a pure matrix gas and monitoring the output of the test purifier for active impurity types. These tests are performed at the flow rate, operating temperature and pressure recommended by the supplier. The test method described is applicable to large scale clarifiers.

Correct operation of the clarifiers is essential in order to cope with certain limits. The efficiency of the clarifiers is not constant due to various factors such as maintenance or operating limitations. A clarifier may have a nominal 90 percent separation efficiency, while in reality efficiency can range from 20 percent to 60 percent. If the efficiency of the clarifier is unknown, there is a risk of unwanted fuels getting into the main engine and thus a high risk of damage.

Small particles damage fuel injection components, erode the fuel injection nozzle, and disrupt the spray pattern, leading to uneven fuel distribution. To reduce the likelihood of further advancement of fuel with high levels of fine particles, a combination of sedimentation, purification, and filtration is adopted.

In general, the following three situations trigger clarifier efficiency monitoring:

  • When laboratory analysis results show extremely high levels of fine particles in the fuel
  • When operational problems are encountered in propulsion systems
  • As part of a scheduled maintenance routine

While preparing this standard, the following SEMI standards were taken as reference:

  • SEMI E29 Guide to standard pressure, temperature, density and flow units used in mass flow meters and mass flow controllers
  • SEMI F6 Manual for secondary containment of hazardous gas piping systems
  • SEMI F22 Gas distribution systems manual

Our organization, among the numerous test, measurement, analysis and evaluation studies it provides for businesses in various sectors, also provides test services to determine the efficiency of the refiner within the scope of the SEMI F68 standard, with its trained and expert staff and advanced technological equipment.

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