The SEMI F76 standard, developed under an international standards program called Semiconductor Equipment and Materials International (SEMI) , defines a test method for comparing gas processing components for potential particle generation in corrosive gas service. This standard is designed as a practical way to generate performance data for a group of components to be compared in a selection process. The described test method is applicable to valves, particle filters, and low-pressure regulators.
SEMI standards provide manufacturers with guidance on the chemicals and material processes involved in the manufacture of semiconductor chips and other related devices. Thanks to these standards, companies can enter international markets, minimize design risks and increase their productivity.
For the semiconductor industry, high purity, chemical resistance, density and accuracy are important tools for product development and manufacturing processes. Semiconductor materials are materials that gain conductive properties with the effect of mechanical work applied on them. These materials, which are insulators under normal conditions, release some of their electrons and become conductive when external effects such as heat, light, magnetic effect or electrical voltage are applied. When this applied external effect is removed, these substances return to the insulating state again. Thanks to these properties, semiconductors are widely used in the field of electronics.
SEMI standards also relate to stored / compressed gas sources and distribution systems. It also refers generally to highly toxic additive gases during the high-temperature diffusion steps.
While preparing this standard, the following SEMI standards were taken as reference:
Our organization, among the numerous test, measurement, analysis and evaluation studies it provides for businesses in various sectors, also provides test services for the evaluation of particle contribution from gas system components exposed to corrosive gas within the scope of SEMI F76 standard, with its trained and expert staff and advanced technological equipment.
To get an appointment, to get more detailed information or to request an evaluation, you can ask us to fill in our form and reach you.
