Developed under an international standards program called International Semiconductor Equipment and Materials (SEMI), the SEMI F70 standard is a technically approved standard by the Gases Global Technical Committee. The purpose of this standard is to provide a standard methodology and test method for measuring the particulate additive performance of a gas distribution system in terms of the number of particles added to the gas flowing through the system. This standardized procedure is intended to be widely used by gas distribution system suppliers, equipment suppliers and end users.
This test method applies to conventional surface-mounted gas distribution systems used in semiconductor manufacturing equipment. During the tests, the SEMI F70.1-0320 standard attached to this standard is taken into account (test method for determining the particulate contribution of the gas distribution system and its components by impact testing).
One of the most important considerations in designing a gas distribution system is the level of gas purity required at each point of use. Maintaining gas purity is simplified by a centralized system. The choice of materials for installation must be consistent throughout. For example, if a research grade gas is used, all stainless steel construction and diaphragm-free shut-off valves should be used to prevent contamination of the gas stream. In general, there are three purity levels to describe almost any application: all-purpose purity, high purity, and ultra high purity.
SEMI standards and security practices do not claim to address all security issues for their use. It is the responsibility of the users of the standards to establish appropriate safety and health practices and to determine the applicability of restrictions from use.
In short, the purpose of the SEMI F70 standard is to provide a method for measuring the particulate additive performance of a gas distribution system in terms of the number of particles added to the gas flowing through the system.
While preparing this standard, the following SEMI standards were taken as reference:
Among the numerous test, measurement, analysis and evaluation studies it provides for businesses in various sectors, our organization also provides testing services for the determination of the particle contribution of the gas distribution system within the scope of the SEMI F70 standard, with its trained and expert staff and advanced technological equipment.
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