
Developed under an international standards program called International Semiconductor Equipment and Materials (SEMI), the purpose of the SEMI F72 standard is to describe a test method for characterizing the surface composition of passivated 316L stainless steel components considered for installation in a high purity gas distribution system. This test method is designed to be applied to wet surfaces of stainless steel pipe, fittings, valves and other components as a measure of passivation effectiveness. The passivation process is the neutralization process on the iron after the use of rust removing acid.
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The purpose of this test method is to define a general set of instrument parameters and conditions that will obtain reproducible measurements within the chromium-enriched passive oxide layer. This test method has been prepared to characterize the composition and thickness of the chromium-enriched oxide layer of stainless steel surfaces and to detect surface contamination in pipes, fittings, valves and other components. The method involves detecting and measuring the surface element composition by Auger electron spectroscopy (AES). This test method also describes the test method for the depth compositional profile of chromium, iron, nickel, oxygen and carbon extending from the surface taken through the oxide layers and into the base metal. This measurement provides information on oxide thickness and chromium enrichment throughout the passivated region.
Using Auger electron spectroscopy (AES), the sample is bombarded by high energy electrons and some electrons are removed from the target atoms and the atoms are ionized. Since the ionized atom is unstable, an electron from the outer orbital fills the electron vacancy in the inner orbital. This method is a very powerful image analysis technique.
While preparing this standard, the following SEMI standards were taken as reference:
Our organization, among the numerous test, measurement, analysis and evaluation studies it has given for businesses in various sectors, with its trained and expert staff and advanced technological equipment, the test method for Auger electron spectroscopy (AES) within the scope of the SEMI F72 standard is the oxide test method of the wet surfaces of passivated 316L stainless steel components. It also provides testing services for the evaluation of the layer.
