SEMI F77, developed within the framework of an international standards program called the International Semiconductor Equipment and Materials (SEMI) program, which includes activities benefiting industries such as semiconductors, integrated circuits, transistors, diodes, and flat panel displays worldwide, defines a test method for determining the relative resistance of wet surfaces of components intended for use in corrosive gas delivery systems for semiconductor manufacturing to pitting corrosion. This test method is an adaptation of the ASTM G150 standard published by the American Society for Testing and Materials (ASTM) (ASTM G150-18 Standard test method for electrochemical critical pitting temperature testing of stainless steels and related alloys). This standard aims to differentiate between alloy compositions or processes that will affect the corrosion performance of wetted surfaces. The details of the SEMI F77 standard are contained in the ASTM G150 standard, and it is recommended to refer to the ASTM G150 standard for the application of this test method.
The test method described in the SEMI F77 standard includes an electrochemical critical pitting temperature-based procedure used to rank the pitting corrosion resistance of test coupons of wetted surfaces of pipes or representative finished surfaces intended for use in corrosive gas systems. Pitting corrosion is known to be an important mode of corrosion failure in semiconductor gas distribution systems, particularly in components and pipes welded and exposed to corrosive gases and moisture.
Briefly, the SEMI F77 standard test method is an adaptation of the ASTM G150 standard test method and describes a test method for performing the adaptation on coupons or wet surface sections cut from gas supply system components such as cylinders. This is the wet immersion method.
While preparing this standard, the following SEMI standard was taken as reference:
Among the numerous test, measurement, analysis and evaluation studies it provides for businesses in various sectors, our organization also provides testing services to determine the electrochemical critical pitting temperature of stainless steel surfaces used in corrosive gas systems within the scope of SEMI F77 standard, with its trained and expert staff and advanced technological equipment. .
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